微纳通道谐振器检测与表征中的动力学问题

闫寒; 张文明

doi:10.6052/1000-0992-18-006

微纳通道谐振器检测与表征中的动力学问题

doi: 10.6052/1000-0992-18-006

闫寒,
张文明^, ,

上海交通大学机械系统与振动国家重点实验室, 上海 200240

基金项目: 国家杰出青年科学基金(11625208)、国家自然科学基金(11572190,11322215)资助项目

详细信息

作者简介:
通讯作者: † E-mail: wenmingz@sjtu.edu.cn

作者简介: 张文明, 上海交通大学特聘教授, 博士生导师.国家杰出青年科学基金获得者、国家优秀青年科学基金获得者、国家“万人计划”中组部青年拔尖人才、教育部霍英东青年基金获得者、上海市曙光学者、上海市青年科技启明星、上海市青年五四奖章标兵.2010年在日本京都大学做JSPS特别研究员.主要从事机械动力学设计理论与方法及振动控制等方面的教学与科研工作.在国际权威期刊发表SCI论文110余篇, SCI他引1000余次;公开/授权国家发明专利30余项, 软件著作权3项; 出版学术专著1部,参编中英文专著3部.中国微米纳米技术学会微纳执行器与微系统分会副理事长、青年工作委员会委员、中国振动工程学会非线性振动专业委员会委员、转子动力学专业委员会常务理事;担任多个国内外期刊编委;获教育部自然科学奖一等奖、中国振动工程学会青年科技奖等多项奖励.

通讯作者:
张文明

中图分类号: O326;
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出版历程
- 收稿日期: 2018-04-22
- 刊出日期: 2019-02-08

Dynamics problems of micro/nano channel resonators for detection and characterization

YAN Han,
ZHANG Wenming^, ,

State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China

More Information

Author Bio:
corresponding Author: † E-mail: wenmingz@sjtu.edu.cn

Corresponding author: ZHANG Wenming

摘要

摘要: 微纳通道机械谐振器在液体环境中具有超高的谐振频率、品质因子和灵敏度,常用于液体环境中的高精度检测与表征,在生物、医药、化工等领域有着广阔的应用前景.微纳通道机械谐振器的检测与表征功能高度依赖其动力学特性,而此类器件是由谐振结构、内部流体、被检测物和外部激励等多因素组成的耦合系统,涉及的动力学问题较为复杂,已成为谐振器件研究中的前沿热点和瓶颈问题.本文综述了微纳通道机械谐振器的研究进展,总结了谐振器件实现高精度检测与表征功能时的动力学设计原理,详细讨论了谐振器件的稳定性、频响特性、能量耗散、频率波动等动态特性,阐明了不同动力学问题的物理机制及其对谐振器性能的影响规律,可为深入厘清微纳通道机械谐振器的动力学设计问题,提高器件动态性能提供理论参考和技术支撑,对超高频、超高灵敏度谐振器的设计、制造及应用发展具有重要意义.
- 微纳通道谐振器 /
- 检测与表征 /
- 品质因子 /
- 动力学
Abstract: Micro/nano-channel mechanical resonators have ultra-high resonance frequency, quality factor, and sensitivity in liquid environment. Hence they are usually used for high-precision detection and characterization in liquid environments. These resonators have broad application prospects in the fields of biology, medicine, and chemical industry. The detection and characterization functions of micro/nano-channel mechanical are highly dependent on their dynamic characteristics. Such devices are coupled systems composed of multiple components, including resonant structure, internal fluid, detected object, external excitation and so on. As a result, the involved dynamic problems are much complicated, and they have become a hotspot and bottleneck in the research of resonant devices. In this paper, the research progress of micro/ nano-channel mechanical resonators is reviewed. The dynamic design principles for high-precision detection and characterization are summarized. The dynamic characteristics, including stability, frequency response characteristics, energy dissipation, frequency fluctuations and so on, are discussed in detail. The physical mechanism of different dynamics and its influence on the performance of the resonator are expounded. It can provide theoretical reference and technical support for deep understanding of the dynamic design problem of micro/nano-channel mechanical resonators and improve the dynamic performance of the devices. And it is of great significance for the design, manufacture, and application of ultra-high frequency and ultra-high sensitivity devices.
- micro/nano-channel mechanical resonators /
- detection /
- characterization /
- quality factor

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