Abstract: The engineering background of the study of microscale heat transfer has been the cooL ing of microelectronic devices since 1980's and flow and heat transfer in MEMS (Micro- Electron Mechanical System) since 1990's. Microscale heat transfer is characterized by some special phenomena at micro length/time scale differing from that in macro scale. The reasons for that are twofold. One is the invalidity of continuum assumption; the other is the variation of the relative importance of various kinds of forces. Th...